This book explores new principles and methods of nanomanufacturing based on physical/chemical effects through interdisciplinary research and reveals surface/interface effects and scale effects in processing, forming, modification, and cross-scale manufacturing at nanoscale and nanoscale precision. It is a summary of a major research project in the field of engineering and materials science of China, the "Fundamental Research of Nanomanufacturing". It clarifies the evolution mechanism of material structure, establishes the accurate characterization and measurement method of nanomanufacturing process, develops some original nanomanufacturing processes and equipment, and provides theoretical basis for realizing the consistent batch process of nanomanufacturing. It reports a series of research breakthroughs in principles and methods of nano-precision manufacturing, nanoscale structure fabrication as well as efficient and multiscale fabrication of large area nanostructures.

Dr. Bingheng Lu was elected as an academician of the Chinese Academy of Sciences in 2005. He is currently the dean, professor, and doctoral supervisor at the School of Mechanical Engineering of Xi'an Jiaotong University, China. He also serves as the convener of the mechanical discipline evaluation group of the Academic Degrees Committee of the State Council, the Advisory Committee of the National Natural Science Foundation of China, the vice president of the China Society of Mechanical Engineering, the vice president of the China Machinery Manufacturing Technology Association, etc.

Project Overview.- Research Situation.- Nano/Sub-Nanometer Precision Manufacturing.- Consistent Manufacturing of Macro,Micro and Nano Cross-Scale Structures.- Cross-Scale Integrated Manufacturing of Nanostructures and Devices.- New Methods of Laser Micro-Nanomanufacturing.- Other Nanomanufacturing Principles and Technological Breakthroughs.- Outlook.