Addressed to physical and chemical scientists and engineers, this book provides information on the design, manufacture, and assessment of components with critical dimensions or critical tolerances in the 0.1-100 nanometer range. Such tiny parts are now used in automobile engines, cassette players, and other common products. The 16 lectures presente

Introduction to the Series, Preface, List of Contributors, 1. Trends in Instrumentation and Nanotechnology 2. Signal Processing, 3. Correlation Methods Applied to Instrumentation, 4. Mathematical Modelling of Instruments - Application and Design, 5. Algorithms for Computer Aided Precision Metrology, 6. Ultrasonic Sensors, 7. Recent Advances in Solid-State Microsensors, 8. Nanotechnology, 9. Use of Energy Beams for Ultra-high Precision Processing of Materials, 10. Control of High Precision Instruments and Machines, 11. Optical Metrology: The Precision Measurement of Displacement Using Optical Interferometry, 12. Optical Diffraction for Surface Roughness Measurement, 13. Nanoparticle Visualization for Particle Image Velocimetry at Transionic Speeds, 14. High Precision Surface Profilometry: From Stylus to STM, 15. Nanoactuators for Controlled Displacements, 16. Calibration of Linear Transducers by X-ray Interferometry, Index